Dr. Aln Jenk

According to Nikkei BP society, apply to semiconductor, liquid crystal faceplate and solar battery and make in the technological technology in environment protecting mode at present, a lot of new schemes have emerged. Among them, it since needn’t say, technology that can adopt in the original factory is numerous too to used in the most advanced factory, will have bright prospects in the future.

It is the required power consumption of semiconductor manuafcture that the environment supports a great one. The semi-conductive manufacturing installation one ” The standby mode ” The scheme is sent Yu Hou by the industry to look as the technology of reducing energy consumption.

The survey of manufacturing installation electric consumption reveals, the energy consumption difference when and await the opportune moment while working under a lot of situations is not big, some devices and 90% electric energy while even consuming while awaiting the opportune moment and working. So, manufacturers are through setting up the standby mode one after another, in order to reduce the energy consumption while awaiting the opportune moment by a wide margin. Shorten, arouse time from the intersection of sleep and state, guarantee, it influences production efficiency to be still a loud subject solved to remain, but manufacturers such as Toshiba as standby mode advocate,etc. think, this measure can obtain the huge energy-conserving result.

Refer to the countermeasure in environment protecting mode on the manufacturing field of components and parts, cut down the gaseous question of the greenhouse after all. Not merely have carbon dioxide, have the intersection of greenhouse effect and coefficient (Global Warming Potential, suppose carbon dioxide as 1, which kind of value of greenhouse effect of intensity does it have in this) Gas such as PFC up to nearly 10,000, its environmental contamination that causes is very serious, adopts the countermeasure to already become more and more important. Usually, gaseous 30% of greenhouse that the semi-conductive manufacturer discharges are PFC. Among them, 60% come from CVD, 40% comes from the etching device. Take etching device as examples, annual at present to supply nearly 2000 in the whole world, and the platform that has already had the device is counted and has been 1 figure more than this figure. PFC that these etching devices discharge accounts for 40% of all PFC to total. At present, technology and device of removing the above-mentioned harmful substance have already begun to progress.

The coefficient more high NF3 and SF6 of the greenhouse effect, it is the problem remained to solve. Wash (Chamber Cleaning) in the case used for etching device and CVD of gas ,As substitute technology, adopt the greenhouse effect coefficient to be gaseous and dry for zero F2 and wash the scheme to emerge. Compared with the situation that it is washed that wet, dry to wash, favorable to, lengthen, wash life time of case, and lower costs through raising the utilization of capacity even.

In dispelling the organic matter and discharging, a new scheme comes on stage too. Used for washing IPA ‘ Isopropanol) Will release on the atmosphere because of volatilizing, has already presented IPA to detoxify, and even not have IPA technology at present. The principle without IPA is, through drying in the ultra dry air, avoid water stain (Watermark)s Production.

New schemes of technology in environment protecting mode produced, and constantly practical trend in succession, make us expectant to the future. This go, satisfied with the intersection of American and the intersection of car and the intersection of environmental protection and specified method, set each other off, blaze through technological capability with the intersection of Japanese and car. Hoping for these advanced technique tendencies the most, personnel and components and parts maker of the semi-conductive business can share.

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